TY  - BOOK
AU  - Brillson, L. J., ed.
TI  - Frontiers in electronic materials and processing
T2  - American vaccum society series 1
SN  - 0883183374
U1  - 620.11297 
PY  - 1986///
CY  - New York
PB  - American Institute of Physics
N1  - AIP conference proceedings No. 138
ER  -