Frontiers in electronic materials and processing   
ed. by L. J. Brillson 
 - New York  American Institute of Physics  1986 
 - ix, 338p. 
 - American vaccum society series 1 .
<br/><br/> AIP conference proceedings No. 138 
<br/><br/><label>ISBN: </label>0883183374 
<br/><br/><label>Dewey Class. No.: </label>620.11297  / N861