IEEE International symposium on semiconductor manufacturing (7  1996  Cambridge) <br/><br/>
Innovative approaches to growth in the semiconductor industry. Proceedings   

 - Piscataway  IEEE  1996 
 - vi, 479p.  incl. bibl. 
<br/><br/><label>ISBN: </label>0780333721 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / N963 "SER"