TY  - BOOK
AU  - Osgood, R.M., ed.
AU  - Brueck, S.R.J., ed.
AU  - Schlossberg, H.R., ed.
TI  - Laser diagnotics and photochemical processing for semiconductor devices
T2  - Materials Research Society Symposia Proceedings
SN  - 0444007822
U1  - 621.3815206 
PY  - 1983///
CY  - New York
PB  - Norht-Holland
ER  -