Laser diagnotics and photochemical processing for semiconductor devices   
ed. by R.M.Osgood, S.R.J.Brueck and H.R.Schlossberg 
 - New York  Norht-Holland  1983 
 - xiii, 298p. 
 - Materials Research Society Symposia Proceedings  V.17 .
<br/><br/><label>ISBN: </label>0444007822 
<br/><br/><label>Dewey Class. No.: </label>621.3815206  / N83