TY  - BOOK
AU  - Wolfe, Raymond, ed.
AU  - Kahng, Dawon, ed.
TI  - Applied solid state science: Advances in materials and devices supplement; Supp.2,pt.A:Silicon integrated circuits
SN  - 0120029545
U1  - 530.4105 
PY  - 1981///
CY  - New York
PB  - Academic Press
ER  -