TY  - BOOK
AU  - Symposium on the Chemical Vapor Deposition of Refractory Metals and Ceramics (1989
AU  - Besmann, Theodore M., ed. Gallois, Bernard M., ed.
TI  - Chemical vapor deposition of refractory metals and ceramics
T2  - Materials research society symposia proceedings
SN  - 1558990569
U1  - 620.16 
PY  - 1990///
CY  - Pittsburgh
PB  - Materials Research Society
ER  -