Symposium on the Chemical Vapor Deposition of Refractory Metals and Ceramics (1989  Boston) <br/><br/>
Chemical vapor deposition of refractory metals and ceramics   
ed. by Theodore M. Besmann, Bernard M. Gallois 
 - Pittsburgh  Materials Research Society  1990 
 - xiii, 399p. 
 - Materials research society symposia proceedings  V.168. .
<br/><br/><label>ISBN: </label>1558990569 
<br/><br/><label>Dewey Class. No.: </label>620.16  / N90