TY  - BOOK
AU  - Gilsinn, David.
AU  - Kraft, Richard.
TI  - Semiconductor measurement technology: an impurity redistribution computer program
T2  - US., Dept. of Commerce, National Bureau of Standards, Special Publication, 400-57
U1  - 621.381520285 
PY  - 0000///US Commerce, Dept. o
CY  - Washington
PB  - N B S
ER  -