TY  - BOOK
AU  - Jerke, John M.
AU  - Croakin, M. Carroll.
AU  - Varner, Ruth N.
TI  - Interlaboratory study on line width measurements for anti-reflective chromium photo masks
U1  - 621.381548 
PY  - 2983///
CY  - Washington
PB  - National Bureau of Standards
ER  -