Jerke, John M. <br/><br/>
Interlaboratory study on line width measurements for anti-reflective chromium photo masks   
by John M. Jerke, M. Carroll Croakin and Ruth N. Varner 
 - Washington  National Bureau of Standards  2983 
 - vii, 183p. 
<br/><br/><label>Dewey Class. No.: </label>621.381548  / N822