IEEE Workshop on micro electro mechanical systems(9  1996  San Diego) <br/><br/>
Investigation of micro structures, sensors, actuators, machines and systems; Proceedings   

 - New Jersey  IEEE  1996 
 - xxiv, 528p.  incl. bibl. 
<br/><br/><label>ISBN: </label>0780329864 
<br/><br/><label>Dewey Class. No.: </label>621.381  / N962 "SER"