TY  - BOOK
AU  - Ananthasuresh, G.K., ed.
TI  - Optimal synthesis methods for MEMS
T2  - Kluwer International Series in Microsystems
SN  - 1402076207
U1  - 621.812 
PY  - 2003///
CY  - Boston
PB  - Kluwer Academic
ER  -