TY  - BOOK
AU  - ed. by Van Rossum, Marc.
TI  - Trends in ion implantation /editor, Marc Van Rossum
T2  - Solid state phenomena, V.27
SN  - 0878496440
U1  - 530.416 
PY  - 1992///
CY  - Zurich
PB  - Trans. Tech.
ER  -