TY  - BOOK
AU  - Ruska, W. Scot.
TI  - Microelectronic processing: an introduction to the manufacture of integrated circuits
T2  - McGraw-Hill series in electrical engineering
SN  - 0070542805
U1  - 621.3815 
PY  - 1988///
CY  - New York
PB  - McGraw-Hill
ER  -