Ruska, W. Scot. <br/><br/>
Microelectronic processing  an introduction to the manufacture of integrated circuits 
by W. Scot Ruska. 
 - New York  McGraw-Hill  1988 
 - xviii, 430p 
 - McGraw-Hill series in electrical engineering .
<br/><br/><label>ISBN: </label>0070542805 
<br/><br/><label>Dewey Class. No.: </label>621.3815  / N886