TY  - BOOK
AU  - Buchler, Martin G.
TI  - Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship of silicon
T2  - National Bureau of Standards, 400-22
U1  - 621.38171 
PY  - 1976///
CY  - Washington
PB  - N B S
ER  -