Buchler, Martin G. <br/><br/>
Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship of silicon   
by Martin G. Buchler 
 - Washington  N B S  1976 
 - vi, 49p. 
 - National Bureau of Standards, 400-22    Semiconductor measurements technology .
<br/><br/><label>Dewey Class. No.: </label>621.38171  / N761