TY  - BOOK
AU  - Experimental Vacuum Science and Technology
AU  - Dillon, John A., ed.
AU  - Harwood, Vivienne J., ed.
TI  - Experimental vacuum science and technology
SN  - 0824760689
U1  - 621.55 
PY  - 1973///
CY  - New york
PB  - Marcel Dekker
ER  -