1996 advanced semiconductor Manufacturing  Conference  and workshop 

 - Cambridge   IEEE Service CENTER  1996 
 - iv,  479p.:  ill.:  28 cm 
<br/><br/>Include reference  
<br/><br/><label>ISBN: </label>0780333489 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Computer integrated manufacturing  <br/>Oparations management system  for continues flow manufacturing  <br/>APC in the semiconductor industry 
<br/><br/><label>Dewey Class. No.: </label>621.381 51  / IEE