TY  - GEN
AU  - Kjell, J. Gasvik
TI  - Optical Metrology
SN  - 9780470855607
PY  - 2003///
CY  - New York
PB  - John Wiley & Sons, Inc.
UR  - https://onlinelibrary.wiley.com/doi/book/10.1002/0470855606
ER  -