TY  - BOOK
AU  - Rossnagel, Stephen M., ed.
AU  - Cuomo, Jerome J., ed.
AU  - Westwoood, W. D., ed.
TI  - Handbook of plasma processing technology: fundamentals, etching, deposition and surface interactions
T2  - Materials science and process technology series
SN  - 0815512201
U1  - 621.044 
PY  - 1990///
CY  - Park Ridge
PB  - Noyes publications
ER  -