Handbook of plasma processing technology  fundamentals, etching, deposition and surface interactions 
ed. by Stephen M. Rossnagel, Jerome J. Cuomo, W. D. Westwood 
 - Park Ridge  Noyes publications  1990 
 - xxiii, 523p. 
 - Materials science and process technology series .
<br/><br/><label>ISBN: </label>0815512201 
<br/><br/><label>Dewey Class. No.: </label>621.044  / N90