TY  - BOOK
AU  - Marcus, R. B.
AU  - Sheng, T. T.
TI  - Transmission electron microscopy of silicon VLSI Circuits and structures
SN  - 0471092517
U1  - 621.38173 
PY  - 1983///
CY  - New York
PB  - Wiley Interscience
ER  -