Chapman, Brian <br/><br/>
Glow discharge processes  sputtering and plasma etching 
by Brian Chapman 
 - New York  John Wiley and sons  1980 
 - xv, 406p. 
<br/><br/><label>ISBN: </label>047107828X 
<br/><br/><label>Dewey Class. No.: </label>537.52  / N80