Murarka, S.P. <br/><br/>
Silicides for VLSI applications   
by S.P.Murarka 
 - New York  Academic Press  1983 
 - xi, 200p. 
<br/><br/><label>ISBN: </label>0125112203 
<br/><br/><label>Dewey Class. No.: </label>621.38173  / N834