TY  - BOOK
AU  - Cuomo, Jerome J., ed.
AU  - Rossnagel, Stephen M., ed.
AU  - Kaufman, Harold R., ed.
TI  - Handbook of ion beam processing technology: principles, deposition, film modification & synthesis
T2  - Materials science and process technology series
SN  - 081551199X
U1  - 621.3817 
PY  - 1989///
CY  - New Jersey
PB  - Noyes Publications
ER  -