Handbook of ion beam processing technology  principles, deposition, film modification & synthesis 
ed. by Jerome J. Cuomo, Stephen M. Rossnagel, Harold R. Kau. 
 - New Jersey  Noyes Publications  1989 
 - xviii, 438p  includes bibl. 
 - Materials science and process technology series .
<br/><br/><label>ISBN: </label>081551199X 
<br/><br/><label>Dewey Class. No.: </label>621.3817  / N89