TY  - BOOK
ED  - Topical conference on radio frequency power in plasmas (11:1995:Palm Springs)
TI  - Radio frequency power in plasmas: Proceedings/ed. by Ronald Prater, Vincent S Chan
T2  - American Institute of physics. Conference proceedings. 355
SN  - 1563965364
U1  - 530.44 
PY  - 1996///
CY  - New York
PB  - AIP
ER  -