TY - BOOK AU - Symposium on Photon, Beam and Plasma Stimulated Chemical Processeses (1986 AU - Donnelly, Vincent M., ed. Herman, Irving P., ed. Hirose, Masataka., ed. TI - Photon, beam and plasma stimulated chemical processes at surfaces T2 - Materials research society symposia proceedings SN - 0931837413 U1 - 620.11228 PY - 1987/// CY - Pittsburg PB - Materials Research Society ER -