TY  - BOOK
AU  - Buehler, Martin G.
TI  - Semiconductor measurement technology: Defects in PN junctions and MOS capacitors observed using thermally stimulated current capicitance measurements - videotape script/by Martin G. Buehler
T2  - National Bureau of Standards Special Publication
U1  - 621.381528 
PY  - 1976///
CY  - Washington
PB  - NBS
ER  -