TY  - BOOK
AU  - Sawyer, David E. Berning, David W.
TI  - Semiconductor measurement technology: Laser scanning of active semiconductor devices-videotape script /by David E. Sawyer and David W
T2  - National Bureau of Standards Special Publication
U1  - 621.38152028 
PY  - 1976///
CY  - Washington
PB  - NBS
ER  -