TY  - BOOK
AU  - Pandey, Piyush kumar
TI  - Multi-axis motion measurement systems based on optical beam deflection
U1  - 681 
PY  - 2021///
CY  - Bengaluru
PB  - IISc
KW  - nano-positioning
KW  - optical sensing
KW  - motion control
N1  - include bibliographical reference and index; PhD; IISc; 2021
ER  -