Pandey, Piyush kumar Multi-axis motion measurement systems based on optical beam deflection by Piyush kumar Pandey; advised by G.R Jayanth - Bengaluru IISc 2021 - xvii, 131p. include bibliographical reference and index PhD; IISc; 2021 Subjects--Topical Terms: nano-positioningoptical sensingmotion control Dewey Class. No.: 681 / PIY/M