TY  - BOOK
AU  - Viannie, Leema Rose
AU  - Rajanna, k.
TI  - Design, fabrication and development of polymer microcantilever for flow rate measurement and thermal actuation
U1  - 681.2 
PY  - 2017///
CY  - Bengaluru
PB  - IISc
KW  - Fabrication; Microcantilever; MEMS; Cantilever flow sensor; Piezoresistivity
N1  - Dept. of Instrumentation and Applied Physics, IISc. Includes bibliographical references
ER  -