TY - BOOK AU - Anand, Venu. AU - Advised by Rao, Mohan G. TI - Cold atmospheric plasma system-simulation, fabrication, diagnosis and thinfilm deposition U1 - 530.44 PY - 2017/// CY - Bangalore PB - Indian Institute of Science KW - Cold atmospheric plasma system KW - Thin film deposition KW - Optical emission spectroscopy N1 - Includes CD and references; PhD;2017;Centre for Nano Science and Engineering ER -