Rao, L L Rajeswara Design, fabrication and characterization metal oxide semiconductor based MEMS gas sensors for carbon monoxide detection by L L Rajeswara Rao - Bangalore IISc 2017 - xxii, 156p Includes CD IISc, Dept. of IAP, PhD Thesis Subjects--Index Terms: MEMS gas sensors; Carbon monoxide detection; Titanium dioxide thinflim sensing materials Dewey Class. No.: 621.38152015466812 / P17 (THESIS)