Gise, Peter. <br/><br/>
Modern semiconductor fabrication technology   
by Peter Gise, Richard Blanchard 
 - New Jersey  Reston Book  1986 
 - vii, 264p. 
<br/><br/><label>ISBN: </label>0835946843 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / N86