TY - BOOK AU - Narayanachari, K. V. L. V. AU - Srinivasan Ragahvan TI - Stress and microstructural evolution during the growth of transition metal oxide thin films by PVD U1 - 621.38152 PY - 2015/// CY - Bangalore PB - IISc KW - Transition metal oxide thin films; System on chip; System on package; Vapor deposition system N1 - Includes CD; IISc, Dept of MRC, PhD Thesis ER -