TY  - BOOK
AU  - Shekhar, Sudhanshu
AU  - K.K. Vinoy and G.K. Ananthasuresh
TI  - Design fabrication and characterization of low voltage capacitive RF MEMS switches
U1  - 621.3815370153724 
PY  - 2015///
CY  - Bangalore
PB  - IISc
KW  - RF MEMS Switches; Solid State Semiconductor Switches; Dielectric charges; RF MEMS- design, fabrication, characterization
N1  - Includes CD; IISc, Dept of ECE, PhD Thesis
ER  -