Shekhar, Sudhanshu <br/><br/>
Design fabrication and characterization of low voltage capacitive RF MEMS switches 
by Sudhanshu Shekhar 
 - Bangalore  IISc  2015 
 - xx, 199p.   
<br/><br/> Includes CD  IISc, Dept of ECE, PhD Thesis 
<br/><br/><label>Subjects--Index Terms: </label>RF MEMS Switches; Solid State Semiconductor Switches; Dielectric charges; RF MEMS- design, fabrication, characterization 
<br/><br/><label>Dewey Class. No.: </label>621.3815370153724  / P15 (THESIS)