Ruddell, Richard L. <br/><br/>
Developments in semiconductor micro lithography III; V.135   
ed. by Richard L. Ruddell et al. 
 - Washington  SPIE  1978 
 - vi, 170p. 
 - Proceeding of the Society of Photo-Optical Instrumentation Engineers  V.135 .
<br/><br/> V.135 
<br/><br/><label>ISBN: </label>0892521627 
<br/><br/><label>Dewey Class. No.: </label>621.367  / N782