Handbook of silicon based MEMS materials and technologies 
ed by Markku Tilli and Teruki Motooka., et.al 
 - 2nd ed 
 - London  Elsevier  2015 
 - xxxvii, 787p. 
<br/><br/><label>ISBN: </label>9780323299657 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / P15 (CeNSE)