TY  - BOOK
AU  - Liu, Xinyu ed
ED  - Sun, Yu ed
TI  - Micro and nano manipulation tools
T2  - Advanced Micro and Nanosystems
SN  - 9783527337842
U1  - 620.5028 
PY  - 2015///
CY  - Weinheim
PB  - Wiley
ER  -