Monch, Lars <br/><br/>
Production planning and control for semiconductor wafer fabrication facilities 
by Lars Mönch, John W. Fowl Scott J Mason 
 - New York  Springer  2013 
 - xi, 288p. 
<br/><br/><label>ISBN: </label>9781461444718 
<br/><br/><label>Dewey Class. No.: </label>621.38150685  / P13 (MS)