TY  - BOOK
ED  - IEEE International conference on microelectronic test structures (8: Nara: 1995)
TI  - Microelectronic test structures. ICMTS 1995. Proceedings
SN  - 0780320662
U1  - 621.381548 
PY  - 1995///
CY  - New Jersey
PB  - IEEE
ER  -