TY  - BOOK
AU  - Schuegraf, Klaus K.
TI  - Handbook of thin-film deposition processes and techniques: principles, methods, equipment and applications
T2  - Materials science and process technology series
SN  - 0815511531
U1  - 621.3817 
PY  - 1988///
CY  - Park Ridge
PB  - Noyes Pub.
ER  -