Schuegraf, Klaus K. <br/><br/>
Handbook of thin-film deposition processes and techniques  principles, methods, equipment and applications 
by Klaus K. Schuegraf. 
 - Park Ridge  Noyes Pub.  1988 
 - xvii, 413p. 
 - Materials science and process technology series .
<br/><br/><label>ISBN: </label>0815511531 
<br/><br/><label>Dewey Class. No.: </label>621.3817  / N881