TY  - BOOK
AU  - Baltes, Henry,. ed
ED  - Fedder, Gray K,. ed al
TI  - Enabling tehnologies for MEMS and nanodevices: Advanced micro and nanosystems
SN  - 9783527334988
U1  - 620.5 
PY  - 2013///
CY  - Germany
PB  - Wiley-VCH
ER  -