Baltes, Henry,. ed  Brand, Oliver,. ed <br/><br/>
Enabling tehnologies for MEMS and nanodevices  Advanced micro and nanosystems 

 - Germany  Wiley-VCH  2013 
 - xii, 427p. 
<br/><br/><label>ISBN: </label>9783527334988 
<br/><br/><label>Dewey Class. No.: </label>620.5  / P138